Abstract: Microelectromechanical system (MEMS) based pressure sensors have been utilized for decades; however, new trends in pressure sensors have recently emerged, such as increased sensitivity, a ...

Abstract: An ultrasensitive pressure sensor integrated thin-film transistor (TFT) was fabricated by using In-Sn–Zn-O (ITZO) thin film as an active channel layer and hydrothermally grown ZnO nanorods ...